| 摘要 |
PROBLEM TO BE SOLVED: To eliminate necessity of a mask holder corresponding to a mask size when a mask is changed to another one and simplify adjusting works at a time of changing the mask holder, by a method wherein a plurality of masks in different sizes can be mounted by a common mask holder. SOLUTION: When a mask holder 1 is set as it is and a first mask 2 is changed to a second mask 4 having a square shape in a smaller size than the first mask 2, a plate-like mask positioning auxiliary member 5 is disposed between a positioning pin 3 and the second mask 4, so that the second mask 4 is mounted on the wafer holder 1. The positioning auxiliary member 5 has a side face 5a in parallel to a straight line coupling a positioning pin 3a to a positioning pin 3b, a side face 5b in parallel to the side face 5a counter to each other, a side face 5c in parallel to a straight line crossed at a right angle, and a side face 5d in parallel to the side face 5c counter to each other with respect to an extension line of a straight line coupling the positioning pin 3a to the positioning pin 3b so that a positioning pin 3c is disposed, and has a substantially L-shaped configuration. |
