Cleaner for disc-shaped material such as silicon wafer,申请号DE19971042680-传众专利搜索

发明名称	Cleaner for disc-shaped material such as silicon wafer
摘要	The cleaner includes a nozzle assembly providing an almost laminar flow. The disc-shaped material is of Si, there is at least one nozzle in the assembly with a slot and the almost laminar flow of liquid is used for cleaning the material.
申请公布号	DE19742680(A1)	申请公布日期	1999.04.08
申请号	DE19971042680	申请日期	1997.09.26
申请人	WACKER SILTRONIC GESELLSCHAFT FUER HALBLEITERMATERIALIEN AG, 84489 BURGHAUSEN, DE	发明人	KAESER, MAX, 84561 MEHRING, DE;HUBER, LOTHAR, 84489 BURGHAUSEN, DE;FRANK, WALTER, DIPL.-ING. (FH), 84508 BURGKIRCHEN, DE
分类号	B08B3/02;B08B3/04;B08B3/10;B28D7/02;B28D7/04;H01L21/00;H01L21/304;H01L21/306;(IPC1-7):H01L21/302	主分类号	B08B3/02
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