METHODE UND VORRICHTUNG ZUR OBERFLÄCHENANALYSE

摘要

An area to be analyzed is divided into a large number of small regions, and light is projected on every one of the small regions, and data on the spectrums of the small regions are obtained. Plural principal components are extracted from the data (step 208), and the principal component marks of the respective plural components are computed every one of the small regions (step 212). Determined is whether the principal component scores exceed a predetermined value or not respectively. Then, the plural small regions are so classified into plural small region groups that the small regions, whose principal component marks of specified principal components exceed a predetermined value, are included in an identical small region group (step 214). A representative small region (best point) of the representative principal component marks of the specified principal component is extracted from each of the small region groups (step 224). Based on the spectrum of the representative small region, the substances constituting the small region groups are analyzed.