Photo mask carrier table for micro-chip manufacture

摘要

The carrier table (4) comprises a rectangular glass plate which has a large central drill hole (8) in its upper surface for a precise recording of a photo mask (3), and at least three support drill holes (9a-c) for recording height-adjustable actuators, as well as extrusions (11,11',11",12a,b) for reducing the weight, and a V-shaped, intermediate wall structure (4c,4c') with a middle bridge (41) for increasing the rigidity of the carrier table. The extrusions (11") are formed and arranged in the section (4b) of the rectangular plate, in which both support drill holes (9a,b) are formed, in such way, that, a V-shaped, intermediate wall thickness structure (4c,4c') with a middle bridge (41) is formed, which touches the support drill holes and the edge of the central drill hole, outgoing from the middle of the corresponding narrow side of the rectangular plate.