SEMICONDUCTOR COMPONENT AND METHOD FOR THE PRODUCTION THEREOF
摘要
The invention relates to a semiconductor element with a polybenzoxalole-based polymer insulating layer. The invention also relates to a method for producing a semiconductor component whereby a polybenzoxalole-based polymer is used as a dielectric.
申请公布号
WO9917366(A1)
申请公布日期
1999.04.08
申请号
WO1998DE02862
申请日期
1998.09.25
申请人
SIEMENS AKTIENGESELLSCHAFT;SEZI, RECAI;SEBALD, MICHAEL;GROSS, GERHARD
