INK JET TYPE RECORDING HEAD AND METHOD OF PRODUCING SAME

摘要

A method of producing an ink jet type recording head comprising the steps of (A) forming a peel layer (11) undergoing peeling upon irradiation of light on a light-transmitting substrate base (10), (B) forming a common electrode film (3) on the peel layer (11), (C) forming a plurality of piezoelectric devices (4) on the common electrode film (3), (D) forming a reservoir member (5) having a cover-like structure for accommodating therein at least one piezoelectric device (4) and having the inside thereof for forming an ink reservoir (51), (E) irradiating predetermined rays of light from the side of the substrate base (10) to the peel layer (11), causing the peel layer (11) to peel and peeling the substrate base (10), and (F) bonding a pressure chamber substrate (2) having a plurality of pressure chambers (21) formed therein to the common electrode film (3) after the peeling of the substrate base in such a manner as to seal each pressure chamber (21). Because this method can produce the thin pressure chamber substrate separatelyfrom the formation of the piezoelectric device and finally bonds them together, it can produce a head capable of coping with high resolution.