| 发明名称 |
DUAL FACE SHOWER HEAD ELECTRODE FOR A MAGNETRON PLASMA GENERATING APPARATUS |
| 摘要 |
An electrode (10) is provided which can improve the efficiency and quality of plasma-generated coatings in a plasma enhanced chemical vapor deposition coating device. The electrode comprises dual shower head faces (11, 11') containing in the preferred mode a plurality of magnets (13) which are aligned so that the poles of the magnets face in the same direction to thus generate two magnetron faces for each set of magnets.
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| 申请公布号 |
CA2303897(A1) |
申请公布日期 |
1999.04.08 |
| 申请号 |
CA19982303897 |
申请日期 |
1998.09.28 |
| 申请人 |
THE DOW CHEMICAL COMPANY;METROLINE SURFACES, INC. |
发明人 |
DYKHOUSE, JEFFREY R.;HU, ING-FENG |
| 分类号 |
H05H1/46;C23C16/30;C23C16/44;C23C16/455;C23C16/50;C23C16/503;C23C16/509;H01J37/32;H01J37/34;H01L21/302;H01L21/3065;(IPC1-7):H01J37/32 |
主分类号 |
H05H1/46 |
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