HIGHLY TETRAHEDRAL AMORPHOUS CARBON FILMS AND METHODS AND ION-BEAM SOURCE FOR THEIR PRODUCTION,申请号EP19970927892-传众专利搜索

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发明名称	HIGHLY TETRAHEDRAL AMORPHOUS CARBON FILMS AND METHODS AND ION-BEAM SOURCE FOR THEIR PRODUCTION
摘要
申请公布号	EP0906636(A1)	申请公布日期	1999.04.07
申请号	EP19970927892	申请日期	1997.05.29
申请人	AKASHIC MEMORIES CORPORATION	发明人	VEERASAMY, VIJAYEN;WEILER, MANFRED;LI, ERIC
分类号	C03C17/22;C23C14/32;C23C16/26;C23C16/27;G11B5/72;G11B5/84;H01J27/18;H01J37/08;(IPC1-7):H01J27/18	主分类号	C03C17/22
代理机构		代理人
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