发明名称 Junction field effect transistor and method of fabricating the same
摘要 The production of the device involving performing a first diffusion for obtaining a p-type zone (12) and a subsequent n<+> type diffusion to obtain the gate (16). The depth of this latter diffusion with respect to the preceding one defines the channel zone (20) of the JFET. The doping and thickness of the channel (20) make the JFET structure obtainable directly with CMOS technology avoiding the addition of otherwise necessary photolithographic and implantation steps. <IMAGE>
申请公布号 EP0907208(A1) 申请公布日期 1999.04.07
申请号 EP19970830490 申请日期 1997.10.02
申请人 ISTITUTO TRENTINO DI CULTURA 发明人 BELLUTTI, PIERLUIGI;BOSCARDIN, MAURIZIO;ZORZI, NICOLA;DALLA BETTA, GIAN-FRANCO
分类号 H01L21/8232;H01L27/098 主分类号 H01L21/8232
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