LITHOGRAPHIC PROJECTION APPARATUS WITH OFF-AXIS ALIGNMENT UNIT,申请号EP19980903246-传众专利搜索

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发明名称	LITHOGRAPHIC PROJECTION APPARATUS WITH OFF-AXIS ALIGNMENT UNIT
摘要
申请公布号	EP0906590(A1)	申请公布日期	1999.04.07
申请号	EP19980903246	申请日期	1998.03.02
申请人	ASM LITHOGRAPHY B.V.	发明人	BORNEBROEK, FRANK
分类号	H01L21/027;G03F9/00;(IPC1-7):G03F9/00	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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