发明名称 |
Method for producing thin-film solar cell and equipment for producing the same |
摘要 |
<p>A thin-film light absorbing layer which is regulated so as to have any desired gallium concentration and which is capable of attaining a high open-circuit voltage is formed by a simple method at a temperature lower than the softening point of the soda-lime float glass. A light absorbing layer is formed by forming a back electrode on a soda-lime float glass substrate, forming on the back electrode layer a stacked precursor film including a copper-gallium alloy layer and an indium layer by sputtering, and then heating the precursor film in an atmosphere of selenium and/or sulfur. <IMAGE></p> |
申请公布号 |
EP0838864(A3) |
申请公布日期 |
1999.04.07 |
申请号 |
EP19970107184 |
申请日期 |
1997.04.30 |
申请人 |
SHOWA SHELL SEKIYU K.K. |
发明人 |
KUSHIYA, KATSUMI;TACHIYUKI, MUNEYORI;KASE, TAKAHISA |
分类号 |
H01L31/04;C23C14/34;H01L31/032;H01L31/0336;H01L31/18;(IPC1-7):H01L31/18;H01L31/033 |
主分类号 |
H01L31/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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