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发明名称
MAGNETRON SPUTTERING DEVICE
摘要
申请公布号
JPH1192927(A)
申请公布日期
1999.04.06
申请号
JP19970252290
申请日期
1997.09.17
申请人
HITACHI LTD
发明人
KIYONO TOMOYUKI;SEKINE KAZUO;KAMEI MITSUHIRO
分类号
C23C14/35;(IPC1-7):C23C14/35
主分类号
C23C14/35
代理机构
代理人
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