| 摘要 |
A wafer prober system includes a host computer, and a prober device. The prober device includes a plurality of prober circuits, and a plurality of touch screens, each connected to the prober circuit for simultaneously displaying image data and display data from said prober circuit, each of the prober circuit including an image processing section for sequentially photographing wafers checked by probes and outputting image data, a display control section for outputting display data according to the checking, and a prober control section for controlling the outputs of the image processing section and display control section. The control section outputs the image data and display data from the prober circuit, so that the image data and display data are displayed on the touch screen at the same time. Image data and display data are selectively provided by one of prober circuits, from image data and display data displayed on each of touch screens, and are simultaneously displayed on the host computer.
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