| 摘要 |
<p>PROBLEM TO BE SOLVED: To stably detoxify gaseous NF3 by heating waste gas contg. gaseous NF3 , bringing it into contact with a carbon block and allowing the gaseous NF3 to react with the carbon block at a specified reaction temp. to convert the gaseous NF3 into gaseous carbon fluoride and gaseous N2 . SOLUTION: In a treating apparatus 1, waste gas contg. gaseous NF3 is introduced into an inflow pipe 3 and diluted to <=5% NF3 content with inert gas supplied from a diluting gas pass 26. The diluted waste gas is preheated in a preheating tube 8, heated to a reaction temp. of >600 to 900 deg.C in a heating tube 4, blown into a reaction tube 2 from an inlet 11 and brought into contact with a carbon block 5 through the lower space 14 in the tube 2 to convert the gaseous NF3 in the waste gas into poisonless gaseous carbon fluoride and gaseous N2 . The treated harmless gas is discharged from the reaction tube 2 through a discharge pass 6, cooled with a cooler 19 and discharged from the treating apparatus 1.</p> |
