| 摘要 |
PROBLEM TO BE SOLVED: To obtain a fluorinated surface layer excellent in corrosion resistance to halogen-based corrosive gas, excellent resistance to acid and alkali and excellent stability and durability by forcibly oxidizing the surface of a metal material or a metallic coating film and forming a fluorinated layer having specified film thickness on the surface. SOLUTION: The surface of a metal material such as aluminum, aluminum alloy, copper and copper alloy or a metallic coating such as nickel coating formed by electrolytic or electroless plating on a base body is forcibly oxidized. The forced oxidation is preferably carried out by using an oxidative material such as oxygen, especially oxygen produced on the anode by anodic oxidation method, or nitrogen suboxide, nitrogen peroxide, ozone, nitric acid, and hydrogen peroxide. Then the forcibly oxidized film is allowed to react with a fluorinating gas. As the fluorinating gas, fluorine, chlorine trifluoride, nitrogen fluorude or diluted gas of these compds. with inert gas are preferably used. Thereby, oxygen in the forcibly oxidized film is replaced by fluorine to form a fiuorlnated layer and a fluorine-diffused layer having >=1μm film thickness.
|
