SUBSTRATE CARRYING DEVICE

摘要

PROBLEM TO BE SOLVED: To carry out positioning of a substrate without generating particles. SOLUTION: The edge part of a wafer W is detected by a wafer edge part detector provided with a light receiving element 46R in a process in which the wafer W is taken out from a cassette by a hand H. The movement quantity of the hand H from a position of the hand H at this time to a delivery position of a main carrying robot is found out, and the hand H is moved for its movement quantity. It is thus possible to carry out positioning of the wafer W held to the hand H. Since the wafer W does not slide against the hand H, no particle is generated.