发明名称 |
Plasma enhanced CVD apparatus and process, and dry etching apparatus and process |
摘要 |
A plasma enhanced CVD apparatus includes a processing chamber, a pumping system for evacuating the processing chamber, a gas inlet system for introducing a source gas, and a plasma generating electrode provided in the processing chamber for depositing a film on a substrate in the processing chamber by plasma generated by electrical power supplied to the plasma generating electrode; the plasma generating electrode has two terminals, one of the terminals is connected to a radio frequency power source and other of the terminals is grounded through an electrode potential controlling system; and the processing chamber is grounded through an inner wall potential controlling system. The present invention is further directed to a plasma enhanced CVD process, a dry etching apparatus, and a dry etch process.
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申请公布号 |
US5891349(A) |
申请公布日期 |
1999.04.06 |
申请号 |
US19960720868 |
申请日期 |
1996.10.03 |
申请人 |
ANELVA CORPORATION |
发明人 |
TOBE, RYOKI;SASAKI, MASAO;SEKIGUCHI, ATSUSHI;TAKAGI, KEN-ICHI |
分类号 |
C23C16/50;C23C16/509;C23F4/00;H01J37/32;H01L21/285;H01L21/302;H01L21/3065;H05H1/46;(IPC1-7):H05H1/00 |
主分类号 |
C23C16/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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