WAFER TRANSPORTATION MODULE

摘要

PROBLEM TO BE SOLVED: To provide a wafer transportation module in which a handle can be fitted or removed without use of a metallic fastening tool. SOLUTION: An openable and closable door 24 is provided at the shell of a wafer transportation module. The central support structure 60 is provided with the interface part of a treatment device exposed at the bottom of the shell, and an integrally formed wafer support column 92 extended upward in the wafer transportation module 20 to support the wafers 38. The side walls 74, 76 of the shell are provided with a groove 78 having an engaging member cooperating with another engaging member formed in the detachable handle 28. The handle 28 is provided with a detent to lock it at a specified position of the side walls 74, 76.