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发明名称
摘要
申请公布号	JP2593117(Y2)	申请公布日期	1999.04.05
申请号	JP19910039996U	申请日期	1991.05.30
申请人		发明人
分类号	C23C16/52;H01L21/205;(IPC1-7):H01L21/205	主分类号	C23C16/52
代理机构		代理人
主权项
地址

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