| 摘要 |
<p>PURPOSE:To precisely measure pressure in a minute space, and prevent the deterioration of pattern transfer precision, by providing a pipe for measurement which connects a vacuum gauge and the check surface of a retaining stand. CONSTITUTION:In an X-ray aligner, a pipe 30 for measurement having a free end is connected with a chuck surface of a wafer chuck 6. A vacuum gauge 13a detecting pressure in a minute space formed between the rear of a wafer 5 and a chuck surface of the wafer chuck 6 is fixed on the free end of the pipe 30 for measurement. A valve 31 is interposed between an exhaust pipe 11 and the pipe 30 for measurement. A microprocessor (CPU) 20 and a first controller 14a which are controlling means to control a first and a second gas adjusting valves 15a, 15b and the valve 31 are operated by the output signal of the first vacuum gauge 13a.</p> |
