| 摘要 |
<p>A stage device, which is hard to generate moments and deformation when suppressing vibration accompanying the driving of a movable section. A surface plate is supported through a vibrationproof plate on a base, and an X stage composed of a Y guide bar conveying body, a Y guide bar or the like is arranged on the surface plate so as to be movable along an X guide bar and driven through an X-axis linear motor in an X direction. A stator of the X-axis linear motor is supported on the surface plate to be movable through a translation guide in the X direction so that an X braking member mounted to a braking frame fixed to the base imparts to the stator a braking force which cancels a reaction force when the X stage is driven.</p> |
