| 摘要 |
<p>A surface acoustic wave apparatus provided with interdigital electrodes on a piezoelectric substrate made of a 64-degree rotation Y cut lithium niobate (64LN) or 36-degree rotation Y cut lithium tantalate (36LT), wherein the interdigital electrode is composed of a titanium base metal film and an aluminum film formed on this metal film. Both of the titanium base metal film and the aluminum film can be converted into a single crystal film, in which only a spot appears in limited field electron beam diffraction, on the 64LN substrate. On the 36LT substrate, on the other hand, a (111) orientation polycrystalline aluminum film having high orientation can be obtained by forming an aluminum film through a titanium base metal film. When the aluminum film is converted into the single crystal or (111) orientation polycrystal having high orientation, migration of the aluminum atoms can be restricted, and the power resistance can be improved.</p> |
