| 发明名称 |
COMBUSTION APPARATUS AND METHOD FOR FURNACE |
| 摘要 |
A combustion device for use in an oxidation furnace, includes a nozzle providing H2, a nozzle providing O2, and an electrical heating coil placed in the H2 nozzle for heating the H2 to a temperature at which it reacts with the O2. |
| 申请公布号 |
KR0175044(B1) |
申请公布日期 |
1999.04.01 |
| 申请号 |
KR19960004198 |
申请日期 |
1996.02.22 |
| 申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
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| 分类号 |
H01L21/31;C23C8/10;F23D14/66;F23N1/02;F27D99/00;H01L21/30;H01L21/316 |
主分类号 |
H01L21/31 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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