VERFAHREN ZUR ERZEUGUNG EINES KUPFERBILDES AUF EINER AUS ELEKTRISCH NICHTLEITENDEM MATERIAL BESTEHENDEN PLATTE MITTELS EINES PHOTOLITHOGRAPHISCHEN VERFAHRENS,申请号DE19956007926-传众专利搜索

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发明名称	VERFAHREN ZUR ERZEUGUNG EINES KUPFERBILDES AUF EINER AUS ELEKTRISCH NICHTLEITENDEM MATERIAL BESTEHENDEN PLATTE MITTELS EINES PHOTOLITHOGRAPHISCHEN VERFAHRENS
摘要
申请公布号	DE69507926(D1)	申请公布日期	1999.04.01
申请号	DE19956007926	申请日期	1995.04.06
申请人	KONINKLIJKE PHILIPS ELECTRONICS N.V., EINDHOVEN, NL	发明人	VAN DER SLUIS-VAN DER VOORT, ELISABETH, NL-5621 BA EINDHOVEN, NL;GELDERLAND, SIGRID, MARIA, ROMAN, NL-5621 BA EINDHOVEN, NL
分类号	C23C18/52;C23F1/00;C23F1/02;C25D13/06;G03F7/00;G03F7/16;G03F7/30;H01J9/14;H01J17/49;H01J29/46;H01J31/12;H05K1/03;H05K3/06;H05K3/24;H05K3/42;(IPC1-7):G03F7/30	主分类号	C23C18/52
代理机构		代理人
主权项
地址

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