| 摘要 |
<p>A single crystal pulling apparatus for preventing contamination of a single crystal and its first dislocation by moving softly the self-weight of the single crystal when the single crystal is clamped by a clamper, etc., during pulling, effecting pulling-driving after the self-weight movement by a single driving source and disposing all driving devices outside a vacuum chamber for storing the single crystal. The apparatus is provided with a support body (70) for supporting from below an increased diameter portion (5) below a seed crystal (3), a through-hole (73) so formed in the support body (70) as to communicate with the outer circumferential portion through slits (74), and a motor (40) for rotating the support body (70) between a non-holding position and a holding position in the horizontal direction. The position of the support body (70) is controlled in the vertical direction with respect to a seed crystal holder (2), a power for seed crystal pulling means (20) is transmitted to the support body (70) except when its position is controlled in the vertical direction so that the support body (70) and the seed crystal holder (2) can be moved up and down integrally, and the driving sources for these members are disposed outside a vacuum chamber (18) for storing the single crystal.</p> |
