ULTRAPURE WATER PRODUCTION SYSTEM HAVING PRETREATMENT SYSTEM FOR PAPER FORMING BOTH ANEROBIC AND AEROBIC ORGANISM TREATMENT

摘要

There is provided an ultrapure water production system which allows recycled waste water to be microbially treated and thereby reclaimed without causing any clogging of treatment system due to abnormal propagation of microorganisms, and which allows ultrapure water with 1 ppb or lower TOC to be obtained. This ultrapure water production system includes a lower part having an anaerobic organism treatment part (12), and an upper part which is placed above the lower part via a separating wall WB having an opening (16) and which has a biological treatment equipment including an aerobic organism treatment part (1). Since lower anaerobic microorganisms and upper aerobic microorganisms consume nutrition sources for microorganisms, treated water which is difficult for microorganisms to propagate can be obtained. Further, not only TOC but also organic nitrogen compounds are treated by the microorganisms, by which treated water with low electrical conductivity can be obtained.