发明名称 |
Integrierte Schaltungsanordnung mit mindestens zwei unterschiedlich dotierten Gebieten, die elektrisch miteinander verbunden sind, und Verfahren zu deren Herstellung |
摘要 |
The invention concerns an integrated circuit comprising at least two zones (Ga1, Ga2) provided with low resistance structures (St1, St2), for example in silicide, connected after an intermediate oxide covering the zones has been produced, by means of a metal contact (K). Since no step of the process is carried out at high temperature, after the metal contact has been produced, there is no diffusion of doping agent between the two zones (Ga1, Ga2) via the low resistance structures (St1, St2). |
申请公布号 |
DE19734728(C1) |
申请公布日期 |
1999.04.01 |
申请号 |
DE1997134728 |
申请日期 |
1997.08.11 |
申请人 |
SIEMENS AG, 80333 MUENCHEN, DE |
发明人 |
BERTHOLD, ADRIAN, DIPL.-PHYS., 81925 MUENCHEN, DE;SCHWALKE, UDO, DR., 84431 HELDENSTEIN, DE;SCHUMANN, DIRK, DR., 81479 MUENCHEN, DE |
分类号 |
H01L21/768;H01L21/8234;H01L27/088;(IPC1-7):H01L21/768;H01L27/092 |
主分类号 |
H01L21/768 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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