POSITION DETECTING SYSTEM AND EXPOSURE APPARATUS HAVING THE SAME,申请号KR19950037849-传众专利搜索

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发明名称	POSITION DETECTING SYSTEM AND EXPOSURE APPARATUS HAVING THE SAME
摘要
申请公布号	KR0185454(B1)	申请公布日期	1999.04.01
申请号	KR19950037849	申请日期	1995.10.28
申请人	CANON KK.	发明人	HATA, HIDEO
分类号	G01B11/00;G01B11/03;G03F9/00;H01L21/027;(IPC1-7):G03F9/00	主分类号	G01B11/00
代理机构		代理人
主权项
地址

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