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发明名称
IMPROVED CHARGE RATE ELECTROMETER
摘要
申请公布号
EP0879420(A4)
申请公布日期
1999.03.31
申请号
EP19960915853
申请日期
1996.05.16
申请人
MKS INSTRUMENTS, INC.
发明人
LEWIS, JOHN
分类号
G01L9/00;G01R1/30;G01R5/28;G01R19/00;G01R29/24;H03M1/50;(IPC1-7):G01R29/24
主分类号
G01L9/00
代理机构
代理人
主权项
地址
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