发明名称
摘要 In a method of manufacturing an optical semiconductor element including at least the steps of forming a mask having a stripe-like gap or interval on a semiconductor substrate, epitaxially growing a semiconductor ridge including an active layer on only an exposed gap portion of the semiconductor substrate, and epitaxially growing a semiconductor cladding layer to cover the ridge, the thickness of the active layer is substantially the same as the width of the active layer. <IMAGE>
申请公布号 JP2876839(B2) 申请公布日期 1999.03.31
申请号 JP19910216027 申请日期 1991.07.31
申请人 NIPPON DENKI KK 发明人 KITAMURA SHOTARO
分类号 H01L21/20;H01L27/15;H01S5/00;H01S5/227;H01S5/50;(IPC1-7):H01S3/18 主分类号 H01L21/20
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