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发明名称
摘要
申请公布号	JP2876846(B2)	申请公布日期	1999.03.31
申请号	JP19910240317	申请日期	1991.08.28
申请人	NIPPON DENKI KK	发明人	OOTSUKA AKIO
分类号	H01L21/52;H01L21/60;H01L23/28;H01L23/48;H01L23/50;(IPC1-7):H01L21/52	主分类号	H01L21/52
代理机构		代理人
主权项
地址

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