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发明名称
摘要
申请公布号
JP2877496(B2)
申请公布日期
1999.03.31
申请号
JP19900306077
申请日期
1990.11.14
申请人
TOSHIBA KK;TOSHIBA MAIKUROEREKUTORONIKUSU KK
发明人
SASAKI HIROMI;SHIMAZAKI AYAKO
分类号
H01L21/66;G01N31/12;(IPC1-7):H01L21/66
主分类号
H01L21/66
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代理人
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