发明名称 Process for making a Bi-containing ceramic layer like strontium-bismuth-tantalate
摘要 A bismuth-containing ceramic layer is produced using a bismuth precursor dissolved in a formic, acetic or propionic acid solvent. A ceramic layer is produced by (a) dissolving a bismuth precursor in a solvent of an organic acid of formula CnH2n+1COOH (n = 0, 1 or 2) and optionally water; (b) dissolving a further precursor in a further solvent and/or providing a further precursor in the liquid state; and (c) applying the precursors to a substrate and heating. Preferred Feature: The further solvent is the same organic acid or tetrahydrofuran. A strontium-bismuth tantalate layer is formed using a solution of Bi(OAc)3 and Sr(OAc)2 in acetic acid which is heated to above the melting point of a tantalum-containing precursor before mixing with the tantalum-containing precursor in the liquid state.
申请公布号 EP0905277(A1) 申请公布日期 1999.03.31
申请号 EP19980116274 申请日期 1998.08.28
申请人 SIEMENS AKTIENGESELLSCHAFT 发明人 HINTERMAIER, FRANK;MAZURE-ESPEJO, CARLOS
分类号 B05D7/24;C01G29/00;C01G35/00;C23C18/12;H01L21/314;H01L21/316;H01L21/8242;H01L21/8246;H01L27/10;H01L27/105;H01L27/108 主分类号 B05D7/24
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