ASSIST GAS INTRODUCING DEVICE FOR FIB,申请号JP19970238310-传众专利搜索

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发明名称	ASSIST GAS INTRODUCING DEVICE FOR FIB
摘要
申请公布号	JPH1186772(A)	申请公布日期	1999.03.30
申请号	JP19970238310	申请日期	1997.09.03
申请人	JEOL LTD	发明人	KAMUKI DAISUKE
分类号	H01J37/305;H01L21/302;H01L21/3065;(IPC1-7):H01J37/305;H01L21/306	主分类号	H01J37/305
代理机构		代理人
主权项
地址

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