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发明名称
GAS SCRUBBER HAVING DOUBLE EXHAUST GAS INLET PIPE
摘要
申请公布号
KR0170717(B1)
申请公布日期
1999.03.30
申请号
KR19950059522
申请日期
1995.12.27
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
CHOE, MOON-HEE
分类号
H01L21/205;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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