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发明名称
ELEMENT SEPARATING METHOD OF SEMICONDUCTOR DEVICE
摘要
申请公布号
KR0170356(B1)
申请公布日期
1999.03.30
申请号
KR19950052725
申请日期
1995.12.20
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
HWANG, BYUNG-KEUN;CHOE, JI-HYUN;KOO, JOO-SUN;LEE, HAE-JUNG
分类号
H01L21/76;(IPC1-7):H01L21/76
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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