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发明名称
SEMICONDUCTOR INTEGRATED-CIRCUIT DEVICE
摘要
申请公布号
JPH1187453(A)
申请公布日期
1999.03.30
申请号
JP19970239990
申请日期
1997.09.04
申请人
TOSHIBA CORP
发明人
URAKAWA YUKIHIRO
分类号
G01R31/26;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01R31/26
代理机构
代理人
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