发明名称 ACTIVE VIBRATION DAMPER
摘要 PROBLEM TO BE SOLVED: To further improve a vibration damping and vibration control performance of a de-vibrator by a method, wherein the output signals of a plurality of accelerometers in different measurement frequencies after proper signal process have been added to be fed to a floor vibration feed forward compensator for exciting an actuator. SOLUTION: A long term speedometer 16 having extremely low frequency region and a servo-type accelerometer 17 having the sensitivity up to relatively high region are arranged in a floor 18. Next, the output of the long term speedometer 16 is converted into electrical signals via the intermediary of an acceleration amplifier 19 having low-pass filter characteristic, while the output of the servo-type accelerometer 17 is converted into electrical signals via the intermediary of another acceleration amplifier 20 having band-pass filter characteristics. Next, the electrical output of both the acceleration amplifiers 19, 20 are added by an adder circuit 21. The output of these compound accelerometers are led to a floor vibration feed forward compenstor, and in the end the output of the floor vibration feed forward compensator is fed so as to give drive signals for each operational mode in the damping direction.
申请公布号 JPH1187235(A) 申请公布日期 1999.03.30
申请号 JP19970259410 申请日期 1997.09.09
申请人 CANON INC 发明人 WAKUI SHINJI
分类号 G03F7/22;F16F15/02;G03F7/20;H01L21/027;(IPC1-7):H01L21/027 主分类号 G03F7/22
代理机构 代理人
主权项
地址