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发明名称
COMPOSITE DIELECTRIC FILM
摘要
申请公布号
JPH1187623(A)
申请公布日期
1999.03.30
申请号
JP19970240828
申请日期
1997.09.05
申请人
UNITED MICROELECTRON CORP
发明人
SON KISHU;CHEN TSAI-FU
分类号
H01G4/12;H01L21/822;H01L27/04;(IPC1-7):H01L27/04
主分类号
H01G4/12
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代理人
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