发明名称 SEMICONDUCTOR DEVICE
摘要 A semiconductor device comprises a first conductive layer, an insulating layer formed on the first conductive layer, a plurality of contact holes formed through the insulating layer, a second conductive layer consisting of a plurality of pillar-shaped contacts each respectively formed in a corresponding one of the contact holes, the pillar-shaped contacts each respectively having a projecting portion projecting above the insulating layer, and a third conductive layer consisting of a plurality of conductive portions each respectively formed on the projecting portion of a corresponding one of the pillar-shaped contacts in a selectively growing manner.
申请公布号 KR0170013(B1) 申请公布日期 1999.03.30
申请号 KR19940030842 申请日期 1994.11.23
申请人 NEC CORP. 发明人 KOYAMA, KUNIAKI
分类号 H01L21/28;H01L21/768;H01L21/822;H01L21/8242;H01L23/522;H01L27/04;H01L27/10;H01L27/108;H01L29/417;H01L29/45;(IPC1-7):H01L21/28 主分类号 H01L21/28
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