| 发明名称 |
OPTICAL EVALUATOR, OPTICAL EVALUATING METHOD, METHOD AND APPARATUS FOR FABRICATING SEMICONDUCTOR DEVICE, METHOD FOR MANAGING SEMICONDUCTOR FABRICATION SYSTEM AND SEMICONDUCTOR DEVICE |
| 摘要 |
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| 申请公布号 |
JPH1187448(A) |
申请公布日期 |
1999.03.30 |
| 申请号 |
JP19970303808 |
申请日期 |
1997.11.06 |
| 申请人 |
MATSUSHITA ELECTRIC IND CO LTD |
发明人 |
ERIGUCHI KOUJI;YAMADA TAKAYUKI;OKUYAMA MASANORI |
| 分类号 |
H01L21/66;H01L21/265;H01L21/302;H01L21/3065;(IPC1-7):H01L21/66;H01L21/306 |
主分类号 |
H01L21/66 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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