| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas laser oscillator capable of easily executing atmosphere opening work. SOLUTION: In this gas laser oscillator 1 provided with a solenoid valve 23 for rapid filling for filling laser gas in an oscillator chamber 3, a laser oscillator controller 35 for controlling the gas laser oscillator 1, and a pressure sensor 37 for detecting the pressure of the laser gas inside the chamber 3, are provided. By the laser oscillator controller, a present pressure Pbase inside the chamber 3, and the detectable highest pressure Pmax of the pressure sensor 37 after the lapse of fixed time T1 from the start of the rapid filling, are detected, required time T2 until the pressure inside the chamber 3 reaches an atmospheric pressure Patm is computed and obtained, the solenoid valve 23 for the rapid filling is interrupted after the lapse of the required time T2 , and the atmosphere opening of the oscillator chamber 3 is completed. The required time T2 is computed and obtained from a calculation formula T2 =T1 (Patm -Pmax )/(Pmax -Pbase ). |
