| 摘要 |
An angular velocity sensor comprises a substrate, a vibrating member of an elongate plate formed by processing a part of the substrate, a support beam formed by processing a part of the substrate to support a center of the vibrating member in a longitudinal direction thereof, a driving device for driving both longitudinal ends of the vibrating member to vibrate in a first direction, and a detecting device for detecting vibrations of the vibrating member in a second direction perpendicular to the first direction thereby to detect an angular velocity of rotation of the substrate.
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