| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a transporting container for maintaining a sufficient closing property and high quality, even if the container is exposed to various external environments. SOLUTION: An accommodation container 1 for aligning and accommodating a silicon wafer is a box structure where a front is open, and at the same time a plurality of fitting groove holes 5 are formed on the upper and lower surfaces at an opening front side inside the accommodation container 1. Also, the container 1 has an FIMS (front opening interface mechanical standard) door 6 for opening and closing the opening front of the accommodation container 1, a gasket 7 that is adhered to the peripheral surface of the FIMS door 6, a latch mechanism 14 that is provided at the FIMS door 6, allows a gear-lock nib 12 to be fitter to each fitting groove hole 5 when mounting the FIMS door 6, and cancels the fitting of the gear-lock nib 12 for each fitting groove hole 5 when removing the FIMS door 6, and an outer cover 13 for shipping that is fitted to the blocked front of the accommodation container 1 and covers the FIMS door 6. Since the outer lid 13 exhibits a sealing protection function, a sufficient sealing property can be secured, even if the container is exposed to any kind of external environment. High quality can be maintained without causing organic contamination, regardless of the length of transportation time.</p> |
