APPARATUS FOR EVALUATING FOREIGN ARTICLE

摘要

A sample placement portion (20) is fixed to a frame (70). A stage (22) and a cylindrical piezoelectric element (24) are attached to the sample placement portion (20), and on this piezoelectric element (24), a sample (i.e., a semiconductor wafer) (21) is positioned. A light collecting portion (30) and a light receiving portion (50) integrated together are attached slidably to frame (70) for detecting the number and locations of contaminants. In addition, an analyzing portion (80) for analyzing the types of the contaminants is slidably attached to the frame (70). Accordingly, it is made possible to reduce the size of the apparatus and to perform a highly reliable evaluation of the contamination. <IMAGE>