| 摘要 |
<p>PROBLEM TO BE SOLVED: To minimize a required sample shots for alingment with a plurality of reference layers by independently selecting the required numbers of shot positions per respective reference layer, in the case that the reference layers in the case of laminated exposure are plural numbers. SOLUTION: In order to specify a sample shot numbers and the sample shot positions per respective reference layers, a plurality of sample shot files for respective reference layers are prepared on an aligner. For example, in the case of two layers of A and B layers, the required alignment precisions with A and B layers are assumed respectively as a and b. Furthermore, the required sample shot numbers in the A and B layers are assumed respectively as Ma and Mb. Furthermore, assuming the total number of sample shots specified as the global alignment to be M, the required sample shot numbers are displayed in a formula, wherein the Max } represents a function which selects a maximum value which selects, while the Int } represents the integer function.</p> |
