Split-Control gate electrically erasable programmable read only memory (EEPROM) cell

摘要

An EEPROM cell (32) is formed having a vertical select gate (34) and a horizontal select gate (40). The vertical select gate (34) and the horizontal select gate (40) enable two dimensional decoding which selects which one or which plurality of memory cells (32) are enabled for program, erase and read operations. An additional select gate having a control electrode (44) can be added to the cell (32) to provide additional decoding as is necessary. This split gate EEPROM cell (32) can be readily integrated onto an integrated circuit which also contains flash memory (204). The flash memory (204) and the split control gate EEPROM array (202) can share the same common charge pumps circuit (208).