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经营范围
发明名称
PLASMA-PROCESSING METHOD
摘要
申请公布号
JPH1187313(A)
申请公布日期
1999.03.30
申请号
JP19970237034
申请日期
1997.09.02
申请人
TOSHIBA CORP
发明人
KOJIMA KAYOKO;SAITO MAKOTO;ETO HIDEO;SHIMIZU TOSHIO;AOKI KATSUAKI;NIIMURA TADASHI
分类号
G02F1/1343;H01L21/027;H01L21/302;H01L21/306;H01L21/3065;(IPC1-7):H01L21/306;G02F1/134
主分类号
G02F1/1343
代理机构
代理人
主权项
地址
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