SIGNAL CONVERTER, SEMICONDUCTOR INTEGRATED CIRCUIT, EQUIPMENT SERVICEABILITY RATIO MONITOR AND MEASURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To eliminate the need for interfaces, even in the case of different signal specifications of a production facilities and easily measure and record the working condition of the facilities. SOLUTION: A serviceability ratio monitor for measuring and recording the working condition of manufacturing facilities 71 -7n has a signal converter circuit 12. A facility signal converter circuit block 22 converts facilities signals outputted from the facilities 71 -7n , based on the program of a conversion mode according to the facility signals among conversion modes stored in a processing program storage 13, a CPU 24 performs calculations to convert them into serviceability ratio signals to be common signals capable of measuring and recording the serviceability ratio of the monitor.