发明名称 Interferometric measurement of toric surfaces at grazing incidence
摘要 Toric surfaces are mounted on a transparent support plate and measured at grazing incidence using a pair of leading and following diffractive optics for diffracting a test beam with respect to a reference beam. The leading diffractive optic diffracts rays of the test beam through various diffraction angles so that after passing through the transparent support plate, the rays strike the toric surface at a constant grazing angle. The following diffractive optic further diffracts the rays of the test beam through other diffraction angles into realignment with the reference beam.
申请公布号 US5889591(A) 申请公布日期 1999.03.30
申请号 US19960733705 申请日期 1996.10.17
申请人 TROPEL CORPORATION 发明人 BRUNING, JOHN H.
分类号 G01B9/02;G01B11/24;G01B11/255;(IPC1-7):G01B9/02 主分类号 G01B9/02
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